Centimeter-scale nanomechanical resonators with low dissipation
Andrea Cupertino, Dongil Shin, Leo Guo, Peter G. Steeneken, Miguel A. Bessa, Richard A. Norte
Fig. 1, panel (c)
Quality factor against aspect ratio $L/h$ for a Si$_3$N$_4$ string: measured state-of-the-art devices of panel (a) by symbol (blue), the predicted design of this work (red star), the bending-loss and clamping-loss lines and the intrinsic level (grey). The shaded and hatched regions of the print are not drawn.
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Provenance
This panel was recovered from the published vector figure. The plot shown here is re-rendered for interactive viewing and analysis. See the paper for the original figure and full scientific context.
License: CC BY 4.0.
Nat. Commun. 15, 4255 (2024) · DOI: 10.1038/s41467-024-48183-7
Other panels of Fig. 1: (d)
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