Triple nitrogen-vacancy centre fabrication by C5N4Hn ion implantation

Moriyoshi Haruyama; Shinobu Onoda; Taisei Higuchi; Wataru Kada; Atsuya Chiba; Yoshimi Hirano; Tokuyuki Teraji; Ryuji Igarashi; Sora Kawai; Hiroshi Kawarada; Yu Ishii; Ryosuke Fukuda; Takashi Tanii; Junichi Isoya; Takeshi Ohshima; Osamu Hanaizumi

doi:10.1038/s41467-019-10529-x

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Triple nitrogen-vacancy centre fabrication by C5N4Hn ion implantation

Moriyoshi Haruyama et al.

2019Nature Communications 10, 2664CC BY 4.0LCP000104

Nat. Commun. 10, 2664 (2019) · DOI: 10.1038/s41467-019-10529-x

License: CC BY 4.0.

Abstract

Quantum information processing requires quantum registers based on coherently interacting quantum bits. The dipolar couplings between nitrogen vacancy (NV) centres with nanometre separation makes them a potential platform for room-temperature quantum registers. The fabrication of quantum registers that consist of NV centre arrays has not advanced beyond NV pairs for several years. Further scaling up of coupled NV centres by using nitrogen implantation through nanoholes has been hampered because the shortening of the separation distance is limited by the nanohole size and ion straggling. Here, we demonstrate the implantation of C5N4Hn from an adenine ion source to achieve further scaling. Because the C5N4Hn ion may be regarded as an ideal point source, the separation distance is solely determined by straggling. We successfully demonstrate the fabrication of strongly coupled triple NV centres. Our method may be extended to fabricate small quantum registers that can perform quantum information processing at room temperature.

Figures

23 panels with data across 4 figures. Each panel page shows the plot, its columns and its files; each data.csv begins with a header naming the paper, the panel, the source, the license and the provenance route.

Fig. 1

panel (b): Confocal fluorescence map of the implanted region: photon counts (c/s) on a 500 by 500 pixel scan. The print shows a 5 $\mu$m scale bar instead of axes and labels the colour scale in $10^3$ c/s. data.csv
panel (c-1): ODMR spectrum (Single-i) of panel (c): intensity (a.u.) against microwave frequency (MHz). The print stacks the six spectra with vertical offsets on one unticked axis; here each has its own panel and axis. data.csv
panel (c-2): ODMR spectrum (Single-ii) of panel (c): intensity (a.u.) against microwave frequency (MHz). The print stacks the six spectra with vertical offsets on one unticked axis; here each has its own panel and axis. data.csv
panel (c-3): ODMR spectrum (Single-iii) of panel (c): intensity (a.u.) against microwave frequency (MHz). The print stacks the six spectra with vertical offsets on one unticked axis; here each has its own panel and axis. data.csv
panel (c-4): ODMR spectrum (Single-iv) of panel (c): intensity (a.u.) against microwave frequency (MHz). The print stacks the six spectra with vertical offsets on one unticked axis; here each has its own panel and axis. data.csv
panel (c-5): ODMR spectrum (Double) of panel (c): intensity (a.u.) against microwave frequency (MHz). The print stacks the six spectra with vertical offsets on one unticked axis; here each has its own panel and axis. data.csv
panel (c-6): ODMR spectrum (Triple) of panel (c): intensity (a.u.) against microwave frequency (MHz). The print stacks the six spectra with vertical offsets on one unticked axis; here each has its own panel and axis. data.csv

Fig. 2

panel (a): Probability (%) of 1, 2 and 3 NV centres per fluorescent spot (bars, labelled 22.3%, 3.4% and 0.1% in the print) and the best-fitting Poisson distribution $P_\lambda(\eta)$ for 0 to 4 NVs per spot (closed circles joined by a line), on a log axis. data.csv
panel (b): NV creation yield (%) against ion acceleration energy (eV), log-log: this work (closed circle) and three earlier studies as the legend names them (open diamonds, squares, triangles). The solid curve drawn through the diamonds is hosted as a smooth line through them. data.csv
panel (c): Histogram of the Hahn-echo coherence time $T_{2,\mathrm{Hahn}}$ ($\mu$s) in 20 $\mu$s bins, stacked: single (bottom), double and triple (top) NV centres; occurrence on the y axis. The print fills the three with hatching, dots and white; here they are dark grey, light grey and white. data.csv
panel (d): Maximum Hahn-echo coherence time $T_{2,\mathrm{Hahn}}$ ($\mu$s) against ion energy (eV), log-log: this work (closed circle) and seven earlier studies, one marker per study as the legend names them. data.csv

Fig. 3

panel (d-1): Hahn-echo decay of NV$_{\mathrm{A}}$: intensity (a.u.) against total free evolution time $2\tau$ ($\mu$s). Closed circles are the echo data; the solid line is the exponential fit. data.csv
panel (d-2): Hahn-echo decay of NV$_{\mathrm{B}}$: intensity (a.u.) against total free evolution time $2\tau$ ($\mu$s). Closed circles are the echo data; the solid line is the exponential fit. data.csv
panel (d-3): Hahn-echo decay of NV$_{\mathrm{C}}$: intensity (a.u.) against total free evolution time $2\tau$ ($\mu$s). Closed circles are the echo data; the solid line is the exponential fit. data.csv
panel (e-1): DEER signal with NV A as sensor and NV C as emitter: intensity (a.u.) against emitter pulse delay $\tau_1$ ($\mu$s). Closed circles are the data; the solid line is the fit. data.csv
panel (e-2): DEER signal with NV C as sensor and NV B as emitter: intensity (a.u.) against emitter pulse delay $\tau_1$ ($\mu$s). Closed circles are the data; the solid line is the fit. data.csv
panel (e-3): DEER signal with NV A as sensor and NV B as emitter: intensity (a.u.) against emitter pulse delay $\tau_1$ ($\mu$s). Closed circles are the data; the solid line is the fit. data.csv
panel (f-1): DEER signal with NV C as sensor and NV A as emitter: intensity (a.u.) against emitter pulse delay $\tau_1$ ($\mu$s). Closed circles are the data; the solid line is the fit. data.csv
panel (f-2): DEER signal with NV B as sensor and NV C as emitter: intensity (a.u.) against emitter pulse delay $\tau_1$ ($\mu$s). Closed circles are the data; the solid line is the fit. data.csv
panel (f-3): DEER signal with NV B as sensor and NV A as emitter: intensity (a.u.) against emitter pulse delay $\tau_1$ ($\mu$s). Closed circles are the data; the solid line is the fit. data.csv

Fig. 4

panel (a): Mass spectrum of the ions from the adenine ion source: ion current (pA, log axis) against mass (u). The peak labels of the print (C, N, CN up to C$_5$N$_4$H$_n$, the ion used) are not reproduced. data.csv
panel (b): SRIM-calculated depth distributions against range (nm): vacancies (/nm, left axis) created by C$_5$N$_4$H$_n$ ($n = 1$, solid grey) and by a nitrogen ion (dashed grey), and the implanted nitrogen atoms (/nm, right axis, solid black). data.csv
panel (c): Distribution of the separation distance (nm) between two nitrogen atoms implanted at the same point: normalised occurrence in 0.5 nm bins. data.csv

Cite

Moriyoshi Haruyama et al. (16 authors). Triple nitrogen-vacancy centre fabrication by C5N4Hn ion implantation. Nat. Commun. 10, 2664 (2019). https://doi.org/10.1038/s41467-019-10529-x

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